Synchrotron topographic study of Czochralski-grown silicon wafers for advanced memory circuits

M. Tuominen, E. Prieur, J. Partanen, T. Tuomi

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Pages52-53
    Publication statusPublished - 1994
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameOptoelectronics Laboratory, Annual Report 1993
    PublisherTKK
    No.TKK-F-C160

    Keywords

    • silicon, synchrotron x-ray topography

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