Synchrotron Section Topographic study of Czochralski-Grown Silicon Wafers for Advanced Memory Circuits

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • T. Tuomi
  • M. Tuominen
  • E. Prieur
  • J. Partanen
  • J. Lahtinen
  • J. Laakkonen

Research units

Details

Original languageEnglish
Pages (from-to)1699-1701
JournalJournal of the Electrochemical Society
Volume142
Publication statusPublished - 1995
MoE publication typeA1 Journal article-refereed

    Research areas

  • silicon, synchrotron radiation, x-ray topography

ID: 4914234