Swift chemical sputtering of covalently bonded materials

K. Nordlund, E. Salonen, A.V. Krasheninnikov, J. Keinonen

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1203-1211
JournalPure and Applied Chemistry
Volume78
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Keywords

  • chemical sputtering
  • silicon
  • tungsten carbide

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