Surface-Tension-Driven Self-Alignment of Microchips on Black-Silicon-Based Hybrid Template in Ambient Air

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Original languageEnglish
Pages (from-to)739-746
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume22
Issue number3
Publication statusPublished - 21 Feb 2013
MoE publication typeA1 Journal article-refereed

    Research areas

  • Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast

ID: 859318