Surface roughness reduction in atomic layer epitaxy growth of titanium dioxide thin films

M. Ritala, Markku Leskelä, Lauri Niinistö, T. Prohasha, G. Friedbacher, M. Grasserbauer

    Research output: Contribution to journalArticleScientificpeer-review

    45 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)155-162
    JournalThin Solid Films
    Volume249
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALE
    • surface roughness
    • thin films
    • titanium dioxide

    Cite this