Surface roughening and its reduction in ALE growth of TiO2

M. Ritala, M. Leskelä, L.-S. Johansson, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationTKK-Tartu Ülikool 2nd ALE Symposium
    Place of PublicationTartu
    PublisherTARTU ÜLIKOOL
    Publication statusPublished - 1993
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy (ALE)
    • surface
    • thin films
    • titanium dioxide

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