Surface passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer

Joonas Isometsä^*, Zahra Jahanshah Rad, John Fung, Hanchen Liu, Juha Pekka Lehtiö, Toni Pasanen, Oskari Leiviskä, Mikko Miettinen, P. Laukkanen, K. Kokko, Hele Savin, Ville Vähänissi

^*Corresponding author for this work

University of Turku

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COLO: Elimination of contact losses in semiconductors through atomic-scale interface research and engineering
Savin, H., Isometsä, J., Yli-Koski, M., Suihkonen, S., Vähänissi, V., Chen, K. & Lahtiluoma, L.
01/09/2021 → 31/08/2025
Project: Academy of Finland: Other research funding