Surface passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer

Joonas Isometsä^*, Zahra Jahanshah Rad, John Fung, Hanchen Liu, Juha Pekka Lehtiö, Toni Pasanen, Oskari Leiviskä, Mikko Miettinen, P. Laukkanen, K. Kokko, Hele Savin, Ville Vähänissi

^*Corresponding author for this work

University of Turku

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

81 Downloads (Pure)

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3 Finished

4 results

Active
COLO: Elimination of contact losses in semiconductors through atomic-scale interface research and engineering
Savin, H., Isometsä, J., Yli-Koski, M., Suihkonen, S., Vähänissi, V., Chen, K. & Lahtiluoma, L.
01/09/2021 → 31/08/2025
Project: Academy of Finland: Other research funding
Finished
NIR: Super-sensitive γ/X- and NIR-radiation detectors via defect-free nanostructures: Next Imaging Revolution?
Vähänissi, V., Savin, H., Ayedh, H., Setälä, O., Radfar, B., Liu, H., Terletskaia, M., Lahtiluoma, L. & Räisänen, S.
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding
ATTRACT SUGER
Savin, H., Isometsä, J. & Pasanen, T.
01/05/2019 → 31/10/2020
Project: EU: Framework programmes funding
PREIN: Photonics Research and Innovation
Mäkelä, K.
01/01/2019 → 31/12/2022
Project: Academy of Finland: Other research funding