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Surface passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer
Joonas Isometsä*, Zahra Jahanshah Rad, John Fung, Hanchen Liu, Juha Pekka Lehtiö, Toni Pasanen, Oskari Leiviskä, Mikko Miettinen, P. Laukkanen, K. Kokko, Hele Savin, Ville Vähänissi
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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