Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks

Toni Pasanen, Ville Vähänissi, Nicholas Theut, Hele Savin

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

29 Citations (Scopus)
321 Downloads (Pure)

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