Surface Passivation of Al(x)Ga(1-x)As Ohmic Contacts Formation

V. Fischer, E. Ristolainen, P.H. Holloway, W.V. Lampert, T.W. Haas

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)1103-1107
    JournalJournal of Vacuum Science and Technology
    VolumeA
    Issue number12(4)
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • AlGa alloy
    • ohmic contact
    • surface passivation

    Cite this

    Fischer, V., Ristolainen, E., Holloway, P. H., Lampert, W. V., & Haas, T. W. (1994). Surface Passivation of Al(x)Ga(1-x)As Ohmic Contacts Formation. Journal of Vacuum Science and Technology, A(12(4)), 1103-1107.