Surface-controlled deposition of Sc_(2)O_(3) thin films by atomic layer epitaxy using beta-diketonate and organometallic precursors

Matti Putkonen, Minna Nieminen, Jaakko Niinistö, Timo Sajavaara, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)4701-4707
    JournalChemistry of Materials
    Volume13
    Issue number12
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • ALE
    • atomic layer deposition
    • atomic layer epitaxy
    • Sc_(2)O_(3)
    • thin films

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