Substrate-patterning techniques for nitride growth

Research output: Contribution to journalArticle

Standard

Substrate-patterning techniques for nitride growth. / Suihkonen, Sami; Ali, Muhammad; Svensk, Olli; Sintonen, Sakari; Sopanen, Markku; Lipsanen, Harri; Törmä, Pekka T.

In: SPIE, Newsroom, 2010.

Research output: Contribution to journalArticle

Harvard

APA

Vancouver

Author

Suihkonen, Sami ; Ali, Muhammad ; Svensk, Olli ; Sintonen, Sakari ; Sopanen, Markku ; Lipsanen, Harri ; Törmä, Pekka T. / Substrate-patterning techniques for nitride growth. In: SPIE, Newsroom. 2010.

Bibtex - Download

@article{162995d471bb4541b12969edc1727b1b,
title = "Substrate-patterning techniques for nitride growth",
author = "Sami Suihkonen and Muhammad Ali and Olli Svensk and Sakari Sintonen and Markku Sopanen and Harri Lipsanen and T{\"o}rm{\"a}, {Pekka T.}",
year = "2010",
doi = "10.1117/2.1201010.003279",
language = "English",
journal = "SPIE, Newsroom",

}

RIS - Download

TY - JOUR

T1 - Substrate-patterning techniques for nitride growth

AU - Suihkonen, Sami

AU - Ali, Muhammad

AU - Svensk, Olli

AU - Sintonen, Sakari

AU - Sopanen, Markku

AU - Lipsanen, Harri

AU - Törmä, Pekka T.

PY - 2010

Y1 - 2010

UR - http://dx.doi.org/10.1117/2.1201010.003279

U2 - 10.1117/2.1201010.003279

DO - 10.1117/2.1201010.003279

M3 - Article

JO - SPIE, Newsroom

JF - SPIE, Newsroom

ER -

ID: 807927