Substrate-patterning techniques for nitride growth

Sami Suihkonen, Muhammad Ali, Olli Svensk, Sakari Sintonen, Markku Sopanen, Harri Lipsanen, Pekka T. Törmä

Research output: Contribution to journalArticleScientific

Original languageEnglish
JournalSPIE, Newsroom
DOIs
Publication statusPublished - 2010
MoE publication typeB1 Article in a scientific magazine

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