Submicron image reversal by liquid phase deposition of oxide

Antti Niskanen, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)629-632
JournalMicroelectronic Engineering
Issue number57-58
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed

Keywords

  • image reversal
  • LPD
  • oxide
  • pattern transfer
  • photoresist thinning
  • selective deposition

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