@article{5a2638709ddc4a8082f72e81492f3c42,
title = "Submicron image reversal by liquid phase deposition of oxide",
keywords = "image reversal, LPD, oxide, pattern transfer, photoresist thinning, selective deposition, image reversal, LPD, oxide, pattern transfer, photoresist thinning, selective deposition, image reversal, LPD, oxide, pattern transfer, photoresist thinning, selective deposition",
author = "Antti Niskanen and Sami Franssila",
year = "2001",
language = "English",
pages = "629--632",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "57-58",
}