Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia

Research output: Contribution to journalArticleScientificpeer-review

Details

Original languageEnglish
Article number020929
Pages (from-to)020929
Number of pages8
JournalJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume37
Issue number2
Publication statusPublished - 1 Mar 2019
MoE publication typeA1 Journal article-refereed

Researchers

  • Miia Mäntymäki

  • Elisa Atosuo
  • Mikko Heikkilä
  • Marko Vehkamäki
  • Miika Mattinen
  • Kenichiro Mizohata
  • Jyrki Räisänen
  • Mikko Ritala
  • Markku Leskelä

Research units

  • University of Helsinki

Abstract

In this paper, results on the solid state reactions of atomic layer deposited Li 2 CO 3 with HfO 2 and ZrO 2 are reported. An Li 2 CO 3 film was deposited on top of hafnia and zirconia, and the stacks were annealed at various temperatures in air to remove the carbonate and facilitate lithium diffusion into the oxides. It was found that Li + ions are mobile in hafnia and zirconia at high temperatures, diffusing to the film-substrate interface and forming silicates with the Si substrate during heating. Based on grazing incidence x-ray diffraction experiments, no changes in the oxide phases take place during this process. Field emission scanning electron microscopy images reveal that some surface defects are formed on the transition metal oxide surfaces during lithium diffusion. The authors also show that lithium can diffuse through hafnia and react with a potential lithium-ion battery electrode material TiO 2 residing below the HfO 2 layer, forming Li 2 TiO 3 .

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