Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films

Research output: Contribution to journalArticleScientificpeer-review


  • Miia Mäntymäki
  • Kenichiro Mizohata
  • Mikko J. Heikkilä
  • Jyrki Räisänen
  • Mikko Ritala
  • Markku Leskelä

Research units

  • University of Helsinki


The ternary lithium aluminum fluoride Li3AlF6 is formed from two optically interesting fluorides, LiF and AlF3. It has been reported to have a large electronic bandgap with a reasonable lithium-ion conductivity at room temperature, making it a potential electrolyte material for solid state lithium-ion batteries. Because of complications during attempts at direct atomic layer deposition of Li3AlF6, we have studied the deposition of the material using two conversion processes. In Process 1, a conversion reaction takes place when (Althd)3 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionate) and TiF4 are sequentially pulsed onto LiF films. The Li3AlF6 films contained LiF as an impurity phase, as determined with grazing incidence X-ray diffraction (GIXRD), and a large amount of titanium impurity, as determined with time-of-flight elastic recoil detection analysis (ToF-ERDA). In Process 2, AlF3 films are exposed to Lithd vapor, resulting in a conversion reaction that produced Li3AlF6 with some LiF. These films have also been studied with GIXRD and ToF-ERDA, and contained much smaller amounts of titanium and other impurities. The Li:Al metal ratios vary depending on the extent of Lithd exposure. Field emission scanning electron microscopy (FESEM) revealed that the Li3AlF6 films are quite porous.


Original languageEnglish
Pages (from-to)26-33
Number of pages8
JournalThin Solid Films
Publication statusPublished - 31 Aug 2017
MoE publication typeA1 Journal article-refereed

    Research areas

  • Conversion reaction, Fluoride thin films, Lithium aluminum fluoride, Thin films

ID: 28852864