Studies of NiO Thin Film Formation by Atomic Layer Epitaxy

M. Utriainen, M. Kröger-Laukkanen, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    48 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)98-103
    JournalMaterials Science and Engineering
    VolumeB54
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • nickel oxide
    • NiO
    • thin film

    Cite this

    Utriainen, M., Kröger-Laukkanen, M., & Niinistö, L. (1998). Studies of NiO Thin Film Formation by Atomic Layer Epitaxy. Materials Science and Engineering, B54, 98-103.