Structural Properties of Ge Implanted Si(1-x)Ge(x) Layers

Z. Xia, E.O. Ristolainen, H. Ronkainen, J. Saarilahti, K. Grahn, J. Molarius

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Title of host publication4th European Vacuum Conference, 13-17 June, 1994, Uppsala
    Publication statusPublished - 1994
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ion implatation
    • SIMS

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