Structural characterization of the ALE-deposited thin film tin oxide gas sensors

M. Utriainen, L. Niinistö, E.B. Varhegyi, F. Reti, P. Deak

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Pages26
    Publication statusPublished - 1995
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name3rd Baltic ALE Symposium, Helsinki, 23.-24.11.1995
    PublisherUniversity of Helsinki

    Keywords

    • ale
    • gas sensor
    • thin film
    • tin oxide

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