Strontium Titanate Thin Films via Atomic Layer Deposition Using Strontium Tetramethylheptanedione and Titanium Isopropoxide as Precursors

A. Kosola, M. Putkonen, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationCERC3 Young Chemists Workshop, Chemical Preparation of Thin Films, Heterogeneous Catalysts and Related Surface Structures, Tuusula, May 20-23,1999
    EditorsM. Ritala
    Place of PublicationHelsinki
    Pages25
    Publication statusPublished - 1999
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer deposition
    • strontium titanate
    • thin film

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