Stroboscopic white-light interferometry of vibrating microstructures

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We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.


Original languageEnglish
Pages (from-to)16901-16907
Number of pages7
JournalOptics Express
Issue number14
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

    Research areas

  • Imaging systems, Instrumentation, measurement, and metrology, Interference microscopy, Interferometric imaging, Surface dynamics

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