Stroboscopic white-light interferometry of vibrating microstructures

Igor Shavrin, Lauri Lipiäinen, Kimmo Kokkonen, Steffen Novotny, Matti Kaivola, Hanne Ludvigsen

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)
115 Downloads (Pure)

Abstract

We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.
Original languageEnglish
Pages (from-to)16901-16907
Number of pages7
JournalOptics Express
Volume21
Issue number14
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Keywords

  • Imaging systems
  • Instrumentation, measurement, and metrology
  • Interference microscopy
  • Interferometric imaging
  • Surface dynamics

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