Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Kalle Hanhijärvi, I. Kassamakov, Ville Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. Hæggström

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)
Original languageEnglish
JournalOptics Letters
Issue number0
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

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