Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Kalle Hanhijärvi; I. Kassamakov; Ville Heikkinen; J. Aaltonen; L. Sainiemi; K. Grigoras; S. Franssila; E. Hæggström

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Kalle Hanhijärvi, I. Kassamakov, Ville Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. Hæggström

Department of Chemistry and Materials Science

Research output: Contribution to journal › Article › Scientific › peer-review

22 Citations (Scopus)

Original language	English
Journal	Optics Letters
Issue number	0
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

Raw Materials Research Infrastructure
Maarit Karppinen (Manager)
School of Chemical Engineering
Facility/equipment: Facility

Cite this

@article{78ede74fee39472ebebe571d45cc558e,

title = "Stroboscopic supercontinuum white-light interferometer for MEMS characterization",

author = "Kalle Hanhij{\"a}rvi and I. Kassamakov and Ville Heikkinen and J. Aaltonen and L. Sainiemi and K. Grigoras and S. Franssila and E. H{\ae}ggstr{\"o}m",

year = "2012",

language = "English",

journal = "Optics Letters",

issn = "0146-9592",

number = "0",

}

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Equipment

Raw Materials Research Infrastructure

Cite this