Stress behaviour of reactively sputtered nitrogenated carbon films

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • J. Gilvarry
  • A. Chowdhury
  • M. Monclus
  • D.C. Cameron
  • P.J. McNally
  • T. Tuomi

Research units

Details

Original languageEnglish
Pages (from-to)979-984
JournalSurface and Coatings Technology
Volume98
Publication statusPublished - 1998
MoE publication typeA1 Journal article-refereed

    Research areas

  • carbon films, stress behaviour

ID: 4922543