Stress behaviour of reactively sputtered nitrogenated carbon films

J. Gilvarry, A. Chowdhury, M. Monclus, D.C. Cameron, P.J. McNally, T. Tuomi

    Research output: Contribution to journalArticleScientificpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)979-984
    JournalSurface and Coatings Technology
    Volume98
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed

    Keywords

    • carbon films
    • stress behaviour

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