Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

T. Tinttunen, T. Veijola, Heikki Nieminen, V. Ermolov, T. Ryhänen

    Research output: Working paperProfessional

    11 Citations (Scopus)
    Original languageEnglish
    Place of PublicationSan Juan, Puerto Rico
    Publication statusPublished - 2002
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name2002 International Conference on Modeling and Simulation of Microsystems. San Juan, Puerto Rico, 21-25.4.2002


    • capacitive switch
    • equivalent circuit
    • MEMS
    • RF
    • tunable capacitor

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