Static assessment of nanoscale notched silicon beams using the averaged strain energy density method

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Static assessment of nanoscale notched silicon beams using the averaged strain energy density method. / Gallo, Pasquale; Sumigawa, Takashi; Kitamura, Takayuki; Berto, Filippo.

In: Theoretical and Applied Fracture Mechanics, Vol. 95, 2018, p. 261-269.

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@article{c3bcd890a694478c836b845db3e352e7,
title = "Static assessment of nanoscale notched silicon beams using the averaged strain energy density method",
abstract = "This paper extends the averaged Strain Energy Density (SED) method to the static assessment of notched components at the nanoscale. First, in situ micromechanical testing of notched nano-cantilever beams made of single-crystal silicon is briefly reviewed. Then, an alternative strategy based on the Theory of Critical Distances is employed to evaluate the control volume and the critical SED. The method is later verified against experiments and FE analyses. The SED method successfully estimates the load at fracture of nanoscale notched specimens with a maximum discrepancy of 4.7{\%}. Moreover, the method is mesh-independent, and therefore very coarse meshes can be employed in numerical analyses. Finally, the results are discussed on the basis of the breakdown of continuum fracture mechanics at the nanoscale. The extension of the SED approach to the micro- and nanoscales provides a fast and simple tool for the design of micro- and nanodevices.",
keywords = "nanoscale, single-crystal silicon, Strain energy density, fracture, nanomechanics",
author = "Pasquale Gallo and Takashi Sumigawa and Takayuki Kitamura and Filippo Berto",
year = "2018",
doi = "10.1016/j.tafmec.2018.03.007",
language = "English",
volume = "95",
pages = "261--269",
journal = "Theoretical and Applied Fracture Mechanics",
issn = "0167-8442",
publisher = "Elsevier",

}

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TY - JOUR

T1 - Static assessment of nanoscale notched silicon beams using the averaged strain energy density method

AU - Gallo, Pasquale

AU - Sumigawa, Takashi

AU - Kitamura, Takayuki

AU - Berto, Filippo

PY - 2018

Y1 - 2018

N2 - This paper extends the averaged Strain Energy Density (SED) method to the static assessment of notched components at the nanoscale. First, in situ micromechanical testing of notched nano-cantilever beams made of single-crystal silicon is briefly reviewed. Then, an alternative strategy based on the Theory of Critical Distances is employed to evaluate the control volume and the critical SED. The method is later verified against experiments and FE analyses. The SED method successfully estimates the load at fracture of nanoscale notched specimens with a maximum discrepancy of 4.7%. Moreover, the method is mesh-independent, and therefore very coarse meshes can be employed in numerical analyses. Finally, the results are discussed on the basis of the breakdown of continuum fracture mechanics at the nanoscale. The extension of the SED approach to the micro- and nanoscales provides a fast and simple tool for the design of micro- and nanodevices.

AB - This paper extends the averaged Strain Energy Density (SED) method to the static assessment of notched components at the nanoscale. First, in situ micromechanical testing of notched nano-cantilever beams made of single-crystal silicon is briefly reviewed. Then, an alternative strategy based on the Theory of Critical Distances is employed to evaluate the control volume and the critical SED. The method is later verified against experiments and FE analyses. The SED method successfully estimates the load at fracture of nanoscale notched specimens with a maximum discrepancy of 4.7%. Moreover, the method is mesh-independent, and therefore very coarse meshes can be employed in numerical analyses. Finally, the results are discussed on the basis of the breakdown of continuum fracture mechanics at the nanoscale. The extension of the SED approach to the micro- and nanoscales provides a fast and simple tool for the design of micro- and nanodevices.

KW - nanoscale

KW - single-crystal silicon

KW - Strain energy density

KW - fracture

KW - nanomechanics

U2 - 10.1016/j.tafmec.2018.03.007

DO - 10.1016/j.tafmec.2018.03.007

M3 - Article

VL - 95

SP - 261

EP - 269

JO - Theoretical and Applied Fracture Mechanics

JF - Theoretical and Applied Fracture Mechanics

SN - 0167-8442

ER -

ID: 32946734