Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations

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Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations. / Lipiäinen, Lauri; Kokkonen, Kimmo; Kaivola, Matti.

In: Journal of Microelectromechanical Systems, Vol. 24, No. 5, 7113753, 01.10.2015, p. 1642-1646.

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@article{e7c002b119a34620ba88122e2bd3f4e0,
title = "Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations",
abstract = "The ongoing rapid development of digital camera technology together with increasing computing power enabling fast image analysis has opened up possibilities to further advance the performance of full-field interferometry. We present a software-based stabilization method for stroboscopic homodyne full-field interferometry that enables phase sensitive absolute-amplitude measurements of surface vibrations in microelectromechanical devices. The reference signal for the stabilization is obtained from a freely selectable region in the acquired interference images, resulting in a compact interferometer design without the need for additional optical components for monitoring the operation point. The proposed stabilization method is implemented in an LED-based stroboscopic Michelson-type full-field interferometer. To demonstrate the performance of the setup, an out-of-plane vibration field at 12 MHz in a square-plate silicon resonator is characterized. The data analysis reveals that a minimum detectable amplitude of less than 30 pm is achieved in the measurement. These first results already demonstrate the potential of the software-stabilization concept and serve to advance the detection of low-amplitude surface vibrations with full-field interferometry.",
keywords = "acoustic devices, full-field, homodyne detection, interferometry, microelectromechanical devices, surface vibrations, Vibration measurement",
author = "Lauri Lipi{\"a}inen and Kimmo Kokkonen and Matti Kaivola",
year = "2015",
month = "10",
day = "1",
doi = "10.1109/JMEMS.2015.2428433",
language = "English",
volume = "24",
pages = "1642--1646",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers",
number = "5",

}

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TY - JOUR

T1 - Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations

AU - Lipiäinen, Lauri

AU - Kokkonen, Kimmo

AU - Kaivola, Matti

PY - 2015/10/1

Y1 - 2015/10/1

N2 - The ongoing rapid development of digital camera technology together with increasing computing power enabling fast image analysis has opened up possibilities to further advance the performance of full-field interferometry. We present a software-based stabilization method for stroboscopic homodyne full-field interferometry that enables phase sensitive absolute-amplitude measurements of surface vibrations in microelectromechanical devices. The reference signal for the stabilization is obtained from a freely selectable region in the acquired interference images, resulting in a compact interferometer design without the need for additional optical components for monitoring the operation point. The proposed stabilization method is implemented in an LED-based stroboscopic Michelson-type full-field interferometer. To demonstrate the performance of the setup, an out-of-plane vibration field at 12 MHz in a square-plate silicon resonator is characterized. The data analysis reveals that a minimum detectable amplitude of less than 30 pm is achieved in the measurement. These first results already demonstrate the potential of the software-stabilization concept and serve to advance the detection of low-amplitude surface vibrations with full-field interferometry.

AB - The ongoing rapid development of digital camera technology together with increasing computing power enabling fast image analysis has opened up possibilities to further advance the performance of full-field interferometry. We present a software-based stabilization method for stroboscopic homodyne full-field interferometry that enables phase sensitive absolute-amplitude measurements of surface vibrations in microelectromechanical devices. The reference signal for the stabilization is obtained from a freely selectable region in the acquired interference images, resulting in a compact interferometer design without the need for additional optical components for monitoring the operation point. The proposed stabilization method is implemented in an LED-based stroboscopic Michelson-type full-field interferometer. To demonstrate the performance of the setup, an out-of-plane vibration field at 12 MHz in a square-plate silicon resonator is characterized. The data analysis reveals that a minimum detectable amplitude of less than 30 pm is achieved in the measurement. These first results already demonstrate the potential of the software-stabilization concept and serve to advance the detection of low-amplitude surface vibrations with full-field interferometry.

KW - acoustic devices

KW - full-field

KW - homodyne detection

KW - interferometry

KW - microelectromechanical devices

KW - surface vibrations

KW - Vibration measurement

UR - http://www.scopus.com/inward/record.url?scp=84959454923&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2015.2428433

DO - 10.1109/JMEMS.2015.2428433

M3 - Article

VL - 24

SP - 1642

EP - 1646

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

M1 - 7113753

ER -

ID: 1739164