Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations

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The ongoing rapid development of digital camera technology together with increasing computing power enabling fast image analysis has opened up possibilities to further advance the performance of full-field interferometry. We present a software-based stabilization method for stroboscopic homodyne full-field interferometry that enables phase sensitive absolute-amplitude measurements of surface vibrations in microelectromechanical devices. The reference signal for the stabilization is obtained from a freely selectable region in the acquired interference images, resulting in a compact interferometer design without the need for additional optical components for monitoring the operation point. The proposed stabilization method is implemented in an LED-based stroboscopic Michelson-type full-field interferometer. To demonstrate the performance of the setup, an out-of-plane vibration field at 12 MHz in a square-plate silicon resonator is characterized. The data analysis reveals that a minimum detectable amplitude of less than 30 pm is achieved in the measurement. These first results already demonstrate the potential of the software-stabilization concept and serve to advance the detection of low-amplitude surface vibrations with full-field interferometry.


Original languageEnglish
Article number7113753
Pages (from-to)1642-1646
Number of pages5
JournalJournal of Microelectromechanical Systems
Issue number5
Publication statusPublished - 1 Oct 2015
MoE publication typeA1 Journal article-refereed

    Research areas

  • acoustic devices, full-field, homodyne detection, interferometry, microelectromechanical devices, surface vibrations, Vibration measurement

ID: 1739164