Stability of Piezoelectric Al_1-xSc_xN Thin Films

Elmeri Österlund, Glenn Ross, Mervi Paulasto-Kröckel

Research output: Contribution to conference › Poster › Scientific

2 results
- Title(descending)

OtaNano
Rissanen, A. (Manager)
Aalto University
Facility/equipment: Facility
OtaNano - Nanofab
Repo, P. (Manager) & Rissanen, A. (Other)
OtaNano
Facility/equipment: Facility