Stability and residual stresses of sputtered wurtzite AlScN thin films

Elmeri Österlund^*, Glenn Ross, Miguel A. Caro, Mervi Paulasto-Kröckel, Andreas Hollmann, Manuela Klaus, Matthias Meixner, Christoph Genzel, Panu Koppinen, Tuomas Pensala, Agnė Žukauskaitė, Michal Trebala

^*Corresponding author for this work

Department of Electrical Engineering and Automation
Electronics Integration and Reliability
Centre of Excellence in Quantum Technology, QTF
Microsystems Technology
Department of Chemistry and Materials Science

Helmholtz Centre Berlin for Materials and Energy
VTT Technical Research Centre of Finland
Fraunhofer Institute for Applied Solid State Physics

Research output: Contribution to journal › Article › Scientific › peer-review

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POSITION-II: A pilot line for the next generation of smart catheters and implants
Paulasto-Kröckel, M. (Principal investigator), Österlund, E. (Project Member), Bespalova, K. (Project Member), Dong, H. (Project Member), Vuorinen, V. (Project Member) & Kaaos, J. (Project Member)
01/06/2018 → 31/05/2021
Project: Business Finland: Other research funding

Stability and residual stresses of sputtered wurtzite AlScN thin films

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POSITION-II: A pilot line for the next generation of smart catheters and implants