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Stability and residual stresses of sputtered wurtzite AlScN thin films
Elmeri Österlund*, Glenn Ross, Miguel A. Caro, Mervi Paulasto-Kröckel, Andreas Hollmann, Manuela Klaus, Matthias Meixner, Christoph Genzel, Panu Koppinen, Tuomas Pensala, Agnė Žukauskaitė, Michal Trebala
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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