@article{6128fcaf961b4fe9ae2bdf0157eab6eb,
title = "SrCoO(3-delta)thin films by atomic layer deposition",
keywords = "Atomic layer depositionTernary oxideSrCoO(3-delta)Solid oxide fuel cellCathodea, Atomic layer depositionTernary oxideSrCoO(3-delta)Solid oxide fuel cellCathodea, Atomic layer depositionTernary oxideSrCoO(3-delta)Solid oxide fuel cellCathodea",
author = "Esko Ahvenniemi and Mikko Matvejeff and Maarit Karppinen",
year = "2014",
doi = "10.1016/j.apsusc.2014.09.131",
language = "English",
volume = "320",
pages = "838--842",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier Science B.V.",
}