Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator

V. Kaajakari; T. Mattila; A. Oja; H. Kattelus; J. Kiihamäki; Mika Koskenvuori; P. Rantakari; I. Tittonen; H. Seppä

Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator

V. Kaajakari, T. Mattila, A. Oja, H. Kattelus, J. Kiihamäki, Mika Koskenvuori, P. Rantakari, I. Tittonen, H. Seppä

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

55 Citations (Scopus)

Original language	English
Title of host publication	Transducers '03, Boston, USA, June, 2003
Place of Publication	Boston, USA
Publisher	IEEE
Pages	951-954
Publication status	Published - 2003
MoE publication type	A4 Conference publication

Keywords

micromechanics
rf-mems

Cite this

@inproceedings{0231745422fe4a0cbc820afb61f2cadd,

title = "Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator",

keywords = "micromechanics, rf-mems, micromechanics, rf-mems, micromechanics, rf-mems",

author = "V. Kaajakari and T. Mattila and A. Oja and H. Kattelus and J. Kiiham{\"a}ki and Mika Koskenvuori and P. Rantakari and I. Tittonen and H. Sepp{\"a}",

year = "2003",

language = "English",

pages = "951--954",

booktitle = "Transducers '03, Boston, USA, June, 2003",

publisher = "IEEE",

address = "United States",

}

TY - GEN

T1 - Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator

AU - Kaajakari, V.

AU - Mattila, T.

AU - Oja, A.

AU - Kattelus, H.

AU - Kiihamäki, J.

AU - Koskenvuori, Mika

AU - Rantakari, P.

AU - Tittonen, I.

AU - Seppä, H.

PY - 2003

Y1 - 2003

KW - micromechanics

KW - rf-mems

KW - micromechanics

KW - rf-mems

KW - micromechanics

KW - rf-mems

M3 - Conference article in proceedings

SP - 951

EP - 954

BT - Transducers '03, Boston, USA, June, 2003

PB - IEEE

CY - Boston, USA

ER -