Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator

V. Kaajakari, T. Mattila, A. Oja, H. Kattelus, J. Kiihamäki, Mika Koskenvuori, P. Rantakari, I. Tittonen, H. Seppä

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

50 Citations (Scopus)
Original languageEnglish
Title of host publicationTransducers '03, Boston, USA, June, 2003
Place of PublicationBoston, USA
PublisherTransducers '03
Pages951-954
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication

Keywords

  • micromechanics
  • rf-mems

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