Sputtered Mo66Re34 SQUID-on-Tip for High-Field Magnetic and Thermal Nanoimaging

Kousik Bagani*, Jayanta Sarkar, Aviram Uri, Michael L. Rappaport, Martin E. Huber, Eli Zeldov, Yuri Myasoedov

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)


Scanning nanoscale superconducting quantum interference devices (SQUIDs) are gaining interest as highly sensitive microscopic magnetic and thermal characterization tools of quantum and topological states of matter and devices. We introduce a technique of collimated differential-pressure magnetron sputtering for versatile self-aligned fabrication of SQUID-on-tip (SOT) nanodevices, which cannot be produced by conventional sputtering methods due to their diffusive, rather than the required directional point source, deposition. The technique provides access to a broad range of superconducting materials and alloys beyond the elemental superconductors employed in the existing thermal deposition methods, opening the route to greatly enhanced SOT characteristics and functionalities. Utilizing this method, we have developed molybdenum-rhenium (Mo66Re34) SOT devices with sub-50-nm diameter, magnetic flux sensitivity of 1.2 μφ0/Hz1/2 up to 3 T at 4.2 K, and thermal sensitivity better than 4 μK/Hz1/2 up to 5 T-about five times higher than any previous report-paving the way to nanoscale imaging of magnetic and spintronic phenomena and of dissipation mechanisms in previously inaccessible quantum states of matter.

Original languageEnglish
Article number044062
JournalPhysical Review Applied
Issue number4
Publication statusPublished - 28 Oct 2019
MoE publication typeA1 Journal article-refereed


Dive into the research topics of 'Sputtered Mo<sub>66</sub>Re<sub>34</sub> SQUID-on-Tip for High-Field Magnetic and Thermal Nanoimaging'. Together they form a unique fingerprint.

Cite this