Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)

S. Tuomikoski; K. Huikko; P. Östman; K. Grigoras; Marc Baumann; R. Kostiainen; S. Franssila; T. Kotiaho

Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)

S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho

School of Electrical Engineering

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	French
Pages (from-to)	12
Journal	Bioforum International
Issue number	2
Publication status	Published - 2002
MoE publication type	A1 Journal article-refereed

Keywords

electrochemical etching
mass spectometry
porous silicon
silicon

Cite this

@article{26684b6c09594b68b9f291a6addc4016,

title = "Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)",

keywords = "electrochemical etching, mass spectometry, porous silicon, silicon, electrochemical etching, mass spectometry, porous silicon, silicon, electrochemical etching, mass spectometry, porous silicon, silicon",

author = "S. Tuomikoski and K. Huikko and P. {\"O}stman and K. Grigoras and Marc Baumann and R. Kostiainen and S. Franssila and T. Kotiaho",

year = "2002",

language = "Ranska",

pages = "12",

journal = "Bioforum International",

publisher = "GIT Verlag GmbH",

number = "2",

}

TY - JOUR

T1 - Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)

AU - Tuomikoski, S.

AU - Huikko, K.

AU - Östman, P.

AU - Grigoras, K.

AU - Baumann, Marc

AU - Kostiainen, R.

AU - Franssila, S.

AU - Kotiaho, T.

PY - 2002

Y1 - 2002

KW - electrochemical etching

KW - mass spectometry

KW - porous silicon

KW - silicon

KW - electrochemical etching

KW - mass spectometry

KW - porous silicon

KW - silicon

KW - electrochemical etching

KW - mass spectometry

KW - porous silicon

KW - silicon

M3 - Article

SP - 12

JO - Bioforum International

JF - Bioforum International

IS - 2

ER -