SPE/CE chip in SU-8

S. Tuomikoski, S. Franssila, H. Siren, S. Rovio, A. Hokkanen

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 2005
MoE publication typeD4 Published development or research report or study

Publication series

NameMSB 2005, New Orleans 2005

Keywords

  • su-8

Cite this

Tuomikoski, S., Franssila, S., Siren, H., Rovio, S., & Hokkanen, A. (2005). SPE/CE chip in SU-8. (MSB 2005, New Orleans 2005).