@techreport{2d502a0455484575b4379e923fad4dc9,
title = "Spatial measurements of high-power excimer laser pulses",
keywords = "beam profiling, beam shaping, flat-top distribution, laser ablation, pulsed laser deposition, beam profiling, beam shaping, flat-top distribution, laser ablation, pulsed laser deposition, beam profiling, beam shaping, flat-top distribution, laser ablation, pulsed laser deposition",
author = "I. Jantunen and M. Tuohiniemi and T. Kajava",
year = "1999",
language = "English",
series = "3rd Annual Meeting of the Finnish Optical Society, Joensuu, April 23-24, 1999",
publisher = "University of Joensuu",
pages = "6",
type = "WorkingPaper",
institution = "University of Joensuu",
}