Spatial measurements of high-power excimer laser pulses

I. Jantunen, T. Kajava, M. Tuohiniemi, M. Salomaa

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationTurku
Publication statusPublished - 1999
MoE publication typeD4 Published development or research report or study

Publication series

NameXXXIII Annual Conference of the Finnish Physical Society, Turku, March 4-6, 1999
PublisherUniversity of Turku


  • beam profiling
  • beam shaping
  • flat-top distribution
  • laser ablation
  • pulsed laser deposition

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