Some effects of ion beam treatments on titanium nitride coatings of commercial quality

Rafael R. Manory; Anthony J. Perry; David Rafaja; Roman Nowak

doi:10.1016/S0257-8972(99)00048-1

Some effects of ion beam treatments on titanium nitride coatings of commercial quality

Rafael R. Manory, Anthony J. Perry, David Rafaja, Roman Nowak

Not published at Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

The present work deals with effects of N+ ion implantation on the structure and properties of TiN coatings used in the cutting tools industry: The characterization was performed using glancing incidence X-ray diffraction (GIXRD) and depth-sensing microindentation (ultra-microhardness). Results from PVD-type films are compared with those obtained from CVD TiN. Amorphization was noticed in the former, but not in the latter. Large changes in the residual stress and strain distributions are observed in the implanted zone and hardness measurements show a decrease in hardness after implantation with nitrogen in both PVD and CVD films. The correlation between the tribological data, nanohardness and the observed structural changes is presented and discussed. (C) 1999 Elsevier Science S.A. All rights reserved.

Original language	English
Pages (from-to)	137-142
Number of pages	6
Journal	Surface and Coatings Technology
Volume	114
Issue number	2-3
DOIs	https://doi.org/10.1016/S0257-8972(99)00048-1
Publication status	Published - 12 May 1999
MoE publication type	A1 Journal article-refereed
Event	International Conference on Metallurgical Coatings and Thin Films - San Diego, United States Duration: 25 Apr 1998 → 1 May 1998 Conference number: 25

Keywords

GIXRD
hardness
ion implantation
TiN
RESIDUAL-STRESS
TIN COATINGS
IMPLANTATION
FILMS
WEAR

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10.1016/S0257-8972(99)00048-1

Cite this

@article{b378e1efc8d84a70b7237df7288207ca,

title = "Some effects of ion beam treatments on titanium nitride coatings of commercial quality",

abstract = "The present work deals with effects of N+ ion implantation on the structure and properties of TiN coatings used in the cutting tools industry: The characterization was performed using glancing incidence X-ray diffraction (GIXRD) and depth-sensing microindentation (ultra-microhardness). Results from PVD-type films are compared with those obtained from CVD TiN. Amorphization was noticed in the former, but not in the latter. Large changes in the residual stress and strain distributions are observed in the implanted zone and hardness measurements show a decrease in hardness after implantation with nitrogen in both PVD and CVD films. The correlation between the tribological data, nanohardness and the observed structural changes is presented and discussed. (C) 1999 Elsevier Science S.A. All rights reserved.",

keywords = "GIXRD, hardness, ion implantation, TiN, RESIDUAL-STRESS, TIN COATINGS, IMPLANTATION, FILMS, WEAR",

author = "Manory, {Rafael R.} and Perry, {Anthony J.} and David Rafaja and Roman Nowak",

year = "1999",

month = may,

day = "12",

doi = "10.1016/S0257-8972(99)00048-1",

language = "English",

volume = "114",

pages = "137--142",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier Science",

number = "2-3",

note = "International Conference on Metallurgical Coatings and Thin Films, ICMCTF ; Conference date: 25-04-1998 Through 01-05-1998",

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TY - JOUR

T1 - Some effects of ion beam treatments on titanium nitride coatings of commercial quality

AU - Manory, Rafael R.

AU - Perry, Anthony J.

AU - Rafaja, David

AU - Nowak, Roman

N1 - Conference code: 25

PY - 1999/5/12

Y1 - 1999/5/12

N2 - The present work deals with effects of N+ ion implantation on the structure and properties of TiN coatings used in the cutting tools industry: The characterization was performed using glancing incidence X-ray diffraction (GIXRD) and depth-sensing microindentation (ultra-microhardness). Results from PVD-type films are compared with those obtained from CVD TiN. Amorphization was noticed in the former, but not in the latter. Large changes in the residual stress and strain distributions are observed in the implanted zone and hardness measurements show a decrease in hardness after implantation with nitrogen in both PVD and CVD films. The correlation between the tribological data, nanohardness and the observed structural changes is presented and discussed. (C) 1999 Elsevier Science S.A. All rights reserved.

AB - The present work deals with effects of N+ ion implantation on the structure and properties of TiN coatings used in the cutting tools industry: The characterization was performed using glancing incidence X-ray diffraction (GIXRD) and depth-sensing microindentation (ultra-microhardness). Results from PVD-type films are compared with those obtained from CVD TiN. Amorphization was noticed in the former, but not in the latter. Large changes in the residual stress and strain distributions are observed in the implanted zone and hardness measurements show a decrease in hardness after implantation with nitrogen in both PVD and CVD films. The correlation between the tribological data, nanohardness and the observed structural changes is presented and discussed. (C) 1999 Elsevier Science S.A. All rights reserved.

KW - GIXRD

KW - hardness

KW - ion implantation

KW - TiN

KW - RESIDUAL-STRESS

KW - TIN COATINGS

KW - IMPLANTATION

KW - FILMS

KW - WEAR

U2 - 10.1016/S0257-8972(99)00048-1

DO - 10.1016/S0257-8972(99)00048-1

M3 - Article

VL - 114

SP - 137

EP - 142

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 2-3

T2 - International Conference on Metallurgical Coatings and Thin Films

Y2 - 25 April 1998 through 1 May 1998

ER -