Original language | English |
---|---|
Place of Publication | Espoo |
Publication status | Published - 1997 |
MoE publication type | D5 Textbook, professional manual or guide |
Publication series
Name | Reports in Electron Physics |
---|---|
No. | 13 |
Keywords
- silicon
- silicon dioxide
J. Sinkkonen
Research output: Book/Report › Book › Professional
Original language | English |
---|---|
Place of Publication | Espoo |
Publication status | Published - 1997 |
MoE publication type | D5 Textbook, professional manual or guide |
Name | Reports in Electron Physics |
---|---|
No. | 13 |