Simulations of iron redissolution from oxygen precipitates in CZ-silicon and its impact on gettering efficiency

Hele Väinölä, Peng Zhang, Antti Haarahiltunen, Andrei Istratov, Eicke Weber

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)581-586
JournalSolid State Phenomena
Volume95-96
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Keywords

  • CZ-silicon
  • dissolution
  • gettering
  • iron
  • oxygen precipitates
  • rapid thermal processing

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