Projects per year
Abstract
Atomic layer deposition (ALD) has found significant use in the coating of high-aspect-ratio (HAR) structures. Approaches to model ALD film conformality in HAR structures can generally be classified into diffusion-reaction (DR) models, ballistic transport-reaction (BTR) models and Monte Carlo simulations. This work compares saturation profiles obtained using a DR model and a BTR model. The saturation profiles were compared qualitatively and quantitatively in terms of half-coverage penetration depth, slope at half-coverage penetration depth and adsorption front broadness. The results showed qualitative agreement between the models, except for a section of elevated surface coverage at the end of the structure, ‘trunk’, observed in the BTR model. Quantitatively, the BTR model produced deeper penetration into the structure, lower absolute values of the slope at half-coverage penetration depth and broader adsorption fronts compared to the DR model. These differences affect the values obtained when extracting kinetic parameters from the saturation profiles.
Original language | English |
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Pages (from-to) | 22952-22964 |
Number of pages | 13 |
Journal | Physical Chemistry Chemical Physics |
Volume | 25 |
Issue number | 34 |
Early online date | 10 Aug 2023 |
DOIs | |
Publication status | Published - 14 Sept 2023 |
MoE publication type | A1 Journal article-refereed |
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Dive into the research topics of 'Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion-reaction model and a ballistic transport-reaction model'. Together they form a unique fingerprint.Datasets
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DReaM-ALD – Diffusion-Reaction Model for Atomic Layer Deposition
Verkama, E. (Creator) & Puurunen, R. L. (Creator), Zenodo, 22 Mar 2023
DOI: 10.5281/zenodo.7759194, https://zenodo.org/record/7759195
Dataset: Software or code
Projects
- 2 Finished
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ALDI: Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Puurunen, R. (Principal investigator), Revitzer, H. (Project Member), Viinikainen, T. (Project Member), Gonsalves, C. (Project Member), Velasco Calsina, J. (Project Member), Yim, J. (Project Member), Miikkulainen, V. (Project Member), Ossama, M. (Project Member), Andsten, S. (Project Member) & Larkiala, S. (Project Member)
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding
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Renable Carbon Cycle - Uusiutuva hiilikierto: Conversion of CO2 to Fuels with Tailored Heterogeneous Catalysts
Puurunen, R. (Principal investigator), Arandia Gutierrez, A. (Project Member), Viinikainen, T. (Project Member), Revitzer, H. (Project Member), Sajid, A. (Project Member), Chahal, A. (Project Member), Yim, J. (Project Member), Karinen, R. (Project Member), Haimi, E. (Project Member), Velasco Calsina, J. (Project Member), Kattelus, J. (Project Member), Gonsalves, C. (Project Member) & Kumar Singh, A. (Project Member)
01/01/2020 → 31/12/2023
Project: Academy of Finland: Other research funding