Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model

^*Corresponding author for this work

Research output: Contribution to conference › Poster › Scientific › peer-review

Original language	English
Publication status	Published - 2022
MoE publication type	Not Eligible
Event	International Conference on Atomic Layer Deposition - Ghent, Belgium Duration: 26 Jun 2022 → 29 Jun 2022 Conference number: 22

Conference	International Conference on Atomic Layer Deposition
Abbreviated title	ALD
Country/Territory	Belgium
City	Ghent
Period	26/06/2022 → 29/06/2022

OpenUrl availability

@conference{25d1b9f4510b4bd2b3bea518cf481f42,

title = "Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model",

author = "Velasco, {Jorge A.} and J{\"a}nis J{\"a}rvilehto and Jihong Yim and Christine Gonsalves and Emma Verkama and Puurunen, {Riikka L.}",

year = "2022",

language = "English",

note = "International Conference on Atomic Layer Deposition, ALD ; Conference date: 26-06-2022 Through 29-06-2022",

}

Research output: Contribution to conference › Poster › Scientific › peer-review

TY - CONF

T1 - Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model

AU - Velasco, Jorge A.

AU - Järvilehto, Jänis

AU - Yim, Jihong

AU - Gonsalves, Christine

AU - Verkama, Emma

AU - Puurunen, Riikka L.

N1 - Conference code: 22

PY - 2022

Y1 - 2022

M3 - Poster

T2 - International Conference on Atomic Layer Deposition

Y2 - 26 June 2022 through 29 June 2022

ER -