Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model

^*Corresponding author for this work

Research output: Contribution to conference › Poster › Scientific › peer-review

Original language	English
Publication status	Published - 2022
MoE publication type	Not Eligible
Event	International Conference on Atomic Layer Deposition - International Convention Center (ICC), Ghent, Belgium Duration: 26 Jun 2022 → 29 Jun 2022 Conference number: 22

Conference	International Conference on Atomic Layer Deposition
Abbreviated title	ALD
Country/Territory	Belgium
City	Ghent
Period	26/06/2022 → 29/06/2022

ALDI: Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Puurunen, R. (Principal investigator), Revitzer, H. (Project Member), Viinikainen, T. (Project Member), Gonsalves, C. (Project Member), Velasco Calsina, J. (Project Member), Yim, J. (Project Member), Miikkulainen, V. (Project Member), Ossama, M. (Project Member), Andsten, S. (Project Member) & Larkiala, S. (Project Member)
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding

Cite this

@conference{25d1b9f4510b4bd2b3bea518cf481f42,

title = "Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model",

author = "Velasco, {Jorge A.} and J{\"a}nis J{\"a}rvilehto and Jihong Yim and Christine Gonsalves and Emma Verkama and Puurunen, {Riikka L.}",

year = "2022",

language = "English",

note = "International Conference on Atomic Layer Deposition, ALD ; Conference date: 26-06-2022 Through 29-06-2022",

}

Research output: Contribution to conference › Poster › Scientific › peer-review

TY - CONF

T1 - Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model

AU - Velasco, Jorge A.

AU - Järvilehto, Jänis

AU - Yim, Jihong

AU - Gonsalves, Christine

AU - Verkama, Emma

AU - Puurunen, Riikka L.

N1 - Conference code: 22

PY - 2022

Y1 - 2022

M3 - Poster

T2 - International Conference on Atomic Layer Deposition

Y2 - 26 June 2022 through 29 June 2022

ER -