Simulation Model for Micromechanical Angular Rate Sensor

T. Veijola, H. Kuisma, J. Lahdenperä, T. Ryhänen

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)113-121
    JournalSensors and Actuators A
    VolumeA60
    Publication statusPublished - 1997
    MoE publication typeA1 Journal article-refereed

    Keywords

    • angular rate sensors
    • circuit simulation
    • micromechanics

    Cite this