Silicon surface passivation with atomic layer deposited aluminum nitride

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Researchers

Research units

Details

Original languageEnglish
Title of host publication IEEE 43rd Photovoltaic Specialists Conference (PVSC), Portland, Oregon, USA, June 5-10
Publication statusPublished - 18 Nov 2016
MoE publication typeA4 Article in a conference publication
EventIEEE Photovoltaic Specialists Conference - Portland, United States
Duration: 5 Jun 201610 Jun 2016
Conference number: 43

Publication series

NameConference record of the IEEE Photovoltaic Specialists Conference
PublisherIEEE
ISSN (Print)0160-8371

Conference

ConferenceIEEE Photovoltaic Specialists Conference
Abbreviated titlePVSC
CountryUnited States
CityPortland
Period05/06/201610/06/2016

    Research areas

  • aluminum nitride, atomic layer deposition, surface passivation

ID: 10247797