Silicon Surface Passivation by Mixed Aluminum Precursors in Al2O3 Atomic Layer Deposition

Yameng Bao, Haibing Huang, Zhen Zhu, Jun Lv, Hele Savin

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

12 Citations (Scopus)
154 Downloads (Pure)

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