Silicon Slot Waveguides Filled with Atomic Layer Deposition (ALD)

S. Honkanen, A. Tervonen, A. Säynätjoki, A. Khanna, T. Alasaarela

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationICO-Photonics, October 7-9, 2009, Delphi, Greece
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication


    • atomic layer deposition
    • Si-photonics
    • slot waveguides

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