Silicon Slot Waveguides Filled with Atomic Layer Deposition (ALD)

S. Honkanen; A. Tervonen; A. Säynätjoki; A. Khanna; T. Alasaarela

Silicon Slot Waveguides Filled with Atomic Layer Deposition (ALD)

S. Honkanen, A. Tervonen, A. Säynätjoki, A. Khanna, T. Alasaarela

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	ICO-Photonics, October 7-9, 2009, Delphi, Greece
Pages	1
Publication status	Published - 2009
MoE publication type	A4 Article in a conference publication

Keywords

atomic layer deposition
Si-photonics
slot waveguides

Cite this

@inproceedings{ec3662d1a6384b4395b0b2f7dd60b3ea,

title = "Silicon Slot Waveguides Filled with Atomic Layer Deposition (ALD)",

keywords = "atomic layer deposition, Si-photonics, slot waveguides, atomic layer deposition, Si-photonics, slot waveguides, atomic layer deposition, Si-photonics, slot waveguides",

author = "S. Honkanen and A. Tervonen and A. S{\"a}yn{\"a}tjoki and A. Khanna and T. Alasaarela",

year = "2009",

language = "English",

pages = "1",

booktitle = "ICO-Photonics, October 7-9, 2009, Delphi, Greece",

}

TY - GEN

T1 - Silicon Slot Waveguides Filled with Atomic Layer Deposition (ALD)

AU - Honkanen, S.

AU - Tervonen, A.

AU - Säynätjoki, A.

AU - Khanna, A.

AU - Alasaarela, T.

PY - 2009

Y1 - 2009

KW - atomic layer deposition

KW - Si-photonics

KW - slot waveguides

KW - atomic layer deposition

KW - Si-photonics

KW - slot waveguides

KW - atomic layer deposition

KW - Si-photonics

KW - slot waveguides

M3 - Conference contribution

SP - 1

BT - ICO-Photonics, October 7-9, 2009, Delphi, Greece

ER -